auger

Auger之電子槍:LEG 300-F electron column,最大電壓為25kV.

能量分析器:採spherical sector analyser加上multi-channeltron array,其theoretical energy resolution為20meV~8eV(CAE mode), 0.02%~2.0%(CRR mode).

Handbook of Auger Electron Spectroscopy,K.D.Childs,B.A.Carlson,L.A.La Vanier,J.Moulder, D.F. Poul,W.F.Stickle and D.G.Watson(1995)