ESCA之光源:
(A). Twin anode X-ray Gun,最大能量為15kV, 600W(Al)400W(Mg).
(B). XR5 Monochromated X-ray Gun,最大能量為15kV,200W,beam size650~120um之鋁靶.
能量分析器:採spherical sector analyser加上Multi-channeltron array其Theoretical energy resolution為20meV~8eV(CAE mode),0.02%~2.0%(CRR mode). |