ESCA000600、ESCA0006

化學分析影像能譜儀

Electron Spectroscopy for chemical Analysis System

英國 VG Scientific ESCALAB 250.

ESCA之光源:

(A). Twin anode X-ray Gun,最大能量為15kV, 600W(Al)400W(Mg).

(B). XR5 Monochromated X-ray Gun,最大能量為15kV,200W,beam size650~120um之鋁靶.

能量分析器:採spherical sector analyser加上Multi-channeltron array其Theoretical energy resolution為20meV~8eV(CAE mode),0.02%~2.0%(CRR mode).

最大為5kV,可做清潔表面和Depth profiling分析.其Maximum Beam current>5uA at 4.

OS/2

2002年1 月